Precursors for direct-write nanofabrication with electrons
Sven Barth, Michael Huth, Felix Jungwirth
Abstract
The influence of precursor's chemical composition and side reactions on materials obtained by direct nanoprinting using FEBID techniques is discussed.
Topics & Concepts
NanolithographyMaterials scienceNanotechnologyElectronFabricationPhysicsMedicinePathologyAlternative medicineQuantum mechanicsIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devicesAdvanced Electron Microscopy Techniques and Applications