Effect of the N2/(Ar+N2) ratio on mechanical properties of high entropy nitride (Cr0.35Al0.25Nb0.12Si0.08V0.20)Nx films
Yu-Chia Lin, Sheng-Yu Hsu, Yuan‐Tai Lai, Pei-Hung Kuo, Su-Yueh Tsai, Jenq‐Gong Duh
Topics & Concepts
Materials scienceCoatingNitrideNitrogenAmorphous solidResidual stressSputter depositionSputteringAnalytical Chemistry (journal)Chemical compositionComposite materialThin filmLayer (electronics)CrystallographyNanotechnologyChemistryOrganic chemistryMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research