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First-principles insight into the pH-dependency of the corrosion inhibition ability of benzotriazole and 1,2,4-triazole for copper in chemical mechanical polishing slurry

Pengfei Chang, Zisheng Huang, Huiqin Ling, Yunwen Wu, Ming Li, Tao Hang

2024Corrosion Science36 citationsDOI

Topics & Concepts

BenzotriazoleCopperAdsorptionCorrosionChemical-mechanical planarizationSlurryCorrosion inhibitorPolishingMoleculeTriazoleInorganic chemistryChemistryMetalDeprotonationMaterials scienceChemical engineeringMetallurgyPhysical chemistryOrganic chemistryComposite materialIonEngineeringAdvanced Surface Polishing TechniquesAdvanced materials and compositesCorrosion Behavior and Inhibition
First-principles insight into the pH-dependency of the corrosion inhibition ability of benzotriazole and 1,2,4-triazole for copper in chemical mechanical polishing slurry | Litcius