Multiscale modeling and neural network model based control of a plasma etch process
Tianqi Xiao, Dong Ni
Topics & Concepts
Kinetic Monte CarloPlasma etchingResistive touchscreenArtificial neural networkComputer sciencePlasma modelingMonte Carlo methodModel predictive controlPlasmaSubstrate (aquarium)Statistical physicsControl theory (sociology)Biological systemMaterials sciencePhysicsArtificial intelligenceEtching (microfabrication)MathematicsNanotechnologyControl (management)Computer visionStatisticsOceanographyQuantum mechanicsLayer (electronics)GeologyBiologyAdvanced Control Systems OptimizationPlasma Diagnostics and ApplicationsSemiconductor materials and devices