Note on the energy transport in capacitively coupled plasmas
Hao Wu, Zhaoyu Chen, Lin Yi, Wei Jiang, Ya Zhang
Abstract
Abstract Particle and energy balance relations are the key to understanding the discharge in low-temperature plasmas. In this note, we derived the energy transport balances in capacitively coupled plasmas (CCPs) based on the electromagnetic theory. Then we calculated the energy transport terms in CCPs from particle-in-cell/MonteCarlo (PIC/MC) simulations, including the energy absorption, energy density, energy flow, and the energy dissipation terms, both for the particles and the field. The spatial-temporal dependant and averaged distributions of energy transport terms are shown at different pressure, demonstrating the correctness and the effectiveness of the method. This revisited method may be used to aid the studies of the electrons heating mechanism in CCP, as well as in some other plasma sources.