High-efficiency free-damage electrochemical shear-thickening polishing of single-crystal silicon carbide
Mingjie Shen, Lingwei Wu, Min Wei, Hongyu Chen, Julong Yuan, Binghai Lyu, Hui Deng, Suet To, Tufa Habtamu Beri, Wei Hang
Topics & Concepts
Materials sciencePolishingSilicon carbideThickeningComposite materialElectrochemistryCarbideMetallurgyElectrodePhysical chemistryChemistryPolymer scienceAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research