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Effect of substrate rotation and rapid thermal annealing on thermoelectric properties of Ag-doped Sb2Te3 thin films

Somporn Thaowonkaew, Mekhala Insawang, Athorn Vora–ud, Mati Horprathum, Pennapa Muthitamongkol, Santi Maensiri, Manish Kumar, Thắng Bách Phan, Tosawat Seetawan

2023Vacuum19 citationsDOI

Topics & Concepts

Materials scienceThermoelectric effectThin filmSeebeck coefficientDopingCrystallinitySubstrate (aquarium)Annealing (glass)Electrical resistivity and conductivitySputter depositionAnalytical Chemistry (journal)Thermoelectric materialsGrain sizeSputteringOptoelectronicsComposite materialThermal conductivityNanotechnologyChemistryElectrical engineeringThermodynamicsPhysicsGeologyEngineeringOceanographyChromatographyAdvanced Thermoelectric Materials and DevicesThermal Radiation and Cooling TechnologiesChalcogenide Semiconductor Thin Films
Effect of substrate rotation and rapid thermal annealing on thermoelectric properties of Ag-doped Sb2Te3 thin films | Litcius