High-efficiency wafer-scale finishing of 4H-SiC (0001) surface using chemical-free electrochemical mechanical method with a solid polymer electrolyte
Che Nor Syahirah Binti Che Zulkifle, Kenshin Hayama, Junji Murata
Topics & Concepts
Materials scienceElectrolyteElectrolysisAnodeChemical-mechanical planarizationPolishingSurface finishingWaferElectrochemistryCathodeSurface roughnessSilicon carbideChemical engineeringSurface finishComposite materialNanotechnologyElectrodeChemistryPhysical chemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchSemiconductor materials and devices