Role of MoTi diffusion barrier in amorphous indium-gallium-zinc-oxide thin-film transistors with a copper source/drain electrode
Jin-Lee Kim, Chang Kyu Lee, Min Jae Kim, Sang Ho Lee, Jae Kyeong Jeong
Topics & Concepts
Ohmic contactMaterials scienceThin-film transistorContact resistanceOptoelectronicsTransistorDiffusion barrierAmorphous solidElectrodeAnnealing (glass)NanotechnologyElectrical engineeringComposite materialLayer (electronics)ChemistryOrganic chemistryVoltagePhysical chemistryEngineeringThin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesElectrical and Thermal Properties of Materials