Optimization of Ga2O3 thin film growth via magnetron sputtering: Influence of growth pressure on crystallinity, surface morphology, and optical properties
Ziwei Guo, Yamei Mao
Topics & Concepts
CrystallinityMorphology (biology)Materials scienceSputter depositionChemical engineeringThin filmSputteringComposite materialNanotechnologyGeologyEngineeringPaleontologyGa2O3 and related materialsAdvanced Photocatalysis TechniquesElectronic and Structural Properties of Oxides