Nitrogen and oxygen annealing effects on properties of aluminum-gallium oxide films grown by pulsed laser deposition
Ching‐Ho Tien, Bo-Wen Hsiao, Chien‐Ming Chen, Mu-I. Chen, Jung-Lung Chiang, Dong‐Sing Wuu
Topics & Concepts
Materials scienceAnnealing (glass)Amorphous solidOxygenRaman spectroscopyNitrogenBand gapGalliumAnalytical Chemistry (journal)SapphirePulsed laser depositionOxideUltravioletThin filmChemical engineeringCrystallographyNanotechnologyLaserMetallurgyOpticsOptoelectronicsChemistryPhysicsEngineeringOrganic chemistryChromatographyGa2O3 and related materialsZnO doping and propertiesThin-Film Transistor Technologies