Attaining quantitatively fewer defects in close-packed InGaZnO synthesized using atomic layer deposition
Yoon-Seo Kim, Hyunmin Hong, TaeHyun Hong, Su‐Hwan Choi, Kwun‐Bum Chung, Jin‐Seong Park
Topics & Concepts
Atomic layer depositionLayer (electronics)Deposition (geology)Materials scienceLayer by layerChemical engineeringNanotechnologyCrystallographyChemistryGeologyPaleontologySedimentEngineeringThin-Film Transistor TechnologiesSemiconductor materials and devicesAdvanced Memory and Neural Computing