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Pattern Classification for Small-Sized Defects Using Multi-Head CNN in Semiconductor Manufacturing

Yunseon Byun, Jun‐Geol Baek

2021International Journal of Precision Engineering and Manufacturing16 citationsDOI

Topics & Concepts

WaferPattern recognition (psychology)Artificial intelligenceConvolutional neural networkComputer scienceSemiconductor device fabricationMaterials scienceOptoelectronicsIndustrial Vision Systems and Defect DetectionImage Processing Techniques and ApplicationsImage and Object Detection Techniques
Pattern Classification for Small-Sized Defects Using Multi-Head CNN in Semiconductor Manufacturing | Litcius