A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing
Yi Zhang, Peng Peng, Chongdang Liu, Yanyan Xu, Heming Zhang
Topics & Concepts
OversamplingBenchmark (surveying)Fault detection and isolationBatch processingComputer scienceArtificial neural networkFault (geology)Process (computing)Semiconductor device fabricationResamplingArtificial intelligenceAutoencoderMachine learningPattern recognition (psychology)EngineeringProgramming languageElectrical engineeringSeismologyWaferBandwidth (computing)ActuatorComputer networkGeodesyOperating systemGeographyGeologyIndustrial Vision Systems and Defect DetectionFault Detection and Control SystemsImbalanced Data Classification Techniques