Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect
Kai Liao, Wenjun Wang, Xuesong Mei, Bin Liu
Topics & Concepts
MicrochannelFilamentationFemtosecondMaterials scienceLaserOpticsMillimeterMicrochannel plate detectorOptoelectronicsNanotechnologyPhysicsDetectorLaser Material Processing TechniquesPhotonic and Optical DevicesNanofabrication and Lithography Techniques