Passivation effect on the surface characteristics and corrosion properties of yttrium oxide films undergoing SF6 plasma treatment
Wei‐Kai Wang, Sung‐Yu Wang, Yuhao Zhang, Shih-Yung Huang
Topics & Concepts
Materials sciencePassivationYttriumX-ray photoelectron spectroscopyEtching (microfabrication)OxideSurface roughnessPlasma etchingTransmission electron microscopyScanning electron microscopeCoatingSputteringAnalytical Chemistry (journal)Composite materialThin filmMetallurgyChemical engineeringNanotechnologyLayer (electronics)ChemistryChromatographyEngineeringMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsDiamond and Carbon-based Materials Research