Effect of W-doping on the structure and properties of DLC films prepared by combining physical and chemical vapor deposition
Runwei Song, Sen Chen, Zhongwei Liu, Chunqing Huo, Qiang Chen
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringNanoindentationX-ray photoelectron spectroscopyDiamond-like carbonSputter depositionChemical vapor depositionPlasma-enhanced chemical vapor depositionPhysical vapor depositionRaman spectroscopyDopingNanotechnologySputteringComposite materialThin filmChemical engineeringOptoelectronicsOpticsPhysicsEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites