Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing
Junliang Wang, Pengjie Gao, Jie Zhang, Chao Lu, Bo Shen
Topics & Concepts
Computer scienceSampling (signal processing)WaferFeature (linguistics)Artificial intelligenceConvolution (computer science)Process (computing)Channel (broadcasting)Deep learningSemiconductor device fabricationElectronic engineeringPattern recognition (psychology)Computer visionEngineeringArtificial neural networkElectrical engineeringOperating systemLinguisticsFilter (signal processing)Computer networkPhilosophyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisImage Processing Techniques and Applications