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Development of Ce/Cu co-doped dendritic mesoporous silica nanoparticles (DMSNs) as novel abrasive systems toward high-performance chemical mechanical polishing

Wenjin Zhou, Yang Chen, Chao Wang, Menghan Wang, Ailian Chen

2024Ceramics International13 citationsDOI

Topics & Concepts

Materials scienceChemical-mechanical planarizationMesoporous silicaPolishingAbrasiveNanoparticleMesoporous materialDopingNanotechnologyChemical engineeringComposite materialOptoelectronicsCatalysisChemistryOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesCatalytic Processes in Materials ScienceDiamond and Carbon-based Materials Research
Development of Ce/Cu co-doped dendritic mesoporous silica nanoparticles (DMSNs) as novel abrasive systems toward high-performance chemical mechanical polishing | Litcius