Effects of Al2O3 surface passivation on the radiation hardness of IGTO thin films for thin-film transistor applications
Seong‐Hyun Hwang, Kie Yatsu, Dongho Lee, Ick-Joon Park, Hyuck‐In Kwon
Topics & Concepts
PassivationMaterials scienceThin-film transistorThin filmLayer (electronics)Oxide thin-film transistorOptoelectronicsIrradiationComposite materialNanotechnologyNuclear physicsPhysicsThin-Film Transistor TechnologiesCCD and CMOS Imaging SensorsSemiconductor materials and devices