Highly stable flexible ozone gas sensors using Mn3O4 nanoparticles-decorated IGZO thin films through the SILAR method
Zi-Chun Tseng, You-Yi Jiang, Chia-Yi Lin, Jyun-Yan Do, Tzu-Han Hsu, Cheng-Wei Shih, Yun-Zhen Chang, Su-Yu Liao, Chun‐Ying Huang
Topics & Concepts
Materials scienceAdsorptionAmorphous solidNanoparticleOzoneNanotechnologySemiconductorIonic bondingLayer (electronics)Chemical engineeringThin filmSelectivityOptoelectronicsCatalysisOrganic chemistryIonChemistryEngineeringGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Chemical Sensor Technologies