Ultrashort Pulse Laser Micromachining of Silicon: Effect of Repetition Rate and Assessment of Surface Integrity of Microchannels
Shalini Singh, G.L. Samuel
Topics & Concepts
Materials scienceSurface micromachiningSurface roughnessWaferSiliconSurface integrityOptoelectronicsSurface finishLaserMicroelectromechanical systemsOpticsComposite materialFabricationPhysicsAlternative medicineMedicinePathologyLaser Material Processing TechniquesOcular and Laser Science ResearchAdvanced Surface Polishing Techniques