High-quality plasma-assisted polishing of aluminum nitride ceramic
Rongyan Sun, Xu Yang, Kenta Arima, Kentaro Kawai, Kazuya Yamamura
Topics & Concepts
PolishingMaterials scienceSlurryAbrasiveNitridePlasmaChemical-mechanical planarizationLayer (electronics)DiamondCeramicAluminiumIrradiationSurface modificationMetallurgyComposite materialChemical engineeringQuantum mechanicsEngineeringNuclear physicsPhysicsMetal and Thin Film MechanicsAdvanced ceramic materials synthesisGaN-based semiconductor devices and materials