Metal-insulator transition in zirconium oxynitride films
Jiankun Wu, Zhaoguo Li, Liping Peng, Yong Yi, Jicheng Zhang
Topics & Concepts
Materials scienceZirconiumInsulator (electricity)SputteringElectrical resistivity and conductivitySputter depositionMetalThin filmZirconium nitrideCavity magnetronTransition metalSemiconductorOptoelectronicsComposite materialNanotechnologyMetallurgyNitrideLayer (electronics)ChemistryElectrical engineeringTitanium nitrideBiochemistryCatalysisEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesInorganic Chemistry and Materials