Electrical conductivity enhancement of epitaxially grown TiN thin films
Yeong Gwang Khim, Beomjin Park, Jin Eun Heo, Young Hun Khim, Young Rok Khim, Minseon Gu, Tae Gyu Rhee, Seo Hyoung Chang, Moonsup Han, Young Jun Chang
Topics & Concepts
Materials scienceElectrical resistivity and conductivityEpitaxyTinSapphireCrystalliteThin filmOptoelectronicsTitanium nitrideSputteringConductivityComposite materialNitrideNanotechnologyMetallurgyOpticsLayer (electronics)Electrical engineeringPhysicsEngineeringChemistryLaserPhysical chemistryMetal and Thin Film MechanicsSemiconductor materials and devicesZnO doping and properties