A MEMS based Fabry–Pérot accelerometer with high resolution
Minghui Zhao, Kangli Jiang, Hongwu Bai, Hairong Wang, Xueyong Wei
Topics & Concepts
AccelerometerFabry–Pérot interferometerMicroelectromechanical systemsCantileverChipMaterials scienceInterference (communication)Sensitivity (control systems)DemodulationPiezoresistive effectOptoelectronicsOpticsElectronic engineeringLaserElectrical engineeringEngineeringComputer sciencePhysicsChannel (broadcasting)Composite materialOperating systemMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesPhotonic and Optical Devices