Oxygen diffusion kinetics during SiO2/SiC plasma oxidation
Nannan You, Xinyu Liu, Qian Zhang, Yang Xu, Jiayi Wang, Shengkai Wang
Topics & Concepts
OxygenDiffusionKineticsPlasmaThermal oxidationChemistryChemical physicsAnalytical Chemistry (journal)Chemical engineeringSiliconThermodynamicsEnvironmental chemistryOrganic chemistryEngineeringPhysicsQuantum mechanicsSemiconductor materials and devicesCopper Interconnects and ReliabilitySilicon Carbide Semiconductor Technologies