Combinatorial ALD for the growth of ZnO/TiO<sub>2</sub>nanolaminates and mixed ZnO/TiO<sub>2</sub>nanostructured films
S. Doyle, Louise Ryan, M. McCarthy, M. Modreanu, Michael Schmidt, Fathima Laffir, Ian M. Povey, Martyn E. Pemble
Abstract
The importance of understanding the growth fundamentals of ZnO/TiO 2 nanolaminate structures deposited by atomic layer deposition is explored.
Topics & Concepts
Atomic layer depositionMaterials scienceDeposition (geology)NanotechnologyChemical engineeringLayer (electronics)NanostructureOptoelectronicsEngineeringBiologySedimentPaleontologyZnO doping and propertiesSemiconductor materials and devicesElectronic and Structural Properties of Oxides