Influence of Hf precursor concentration on various properties of sol-gel based spin coated HfO2 thin films
Sabhya, Akshayakumar Kompa, Dhananjaya Kekuda, M.S. Murari, K. Mohan Rao
Topics & Concepts
Materials scienceCrystallinityThin filmX-ray photoelectron spectroscopySol-gelSpin coatingRaman spectroscopyMonoclinic crystal systemHafniumChemical engineeringGrain sizeAnalytical Chemistry (journal)NanotechnologyZirconiumCrystal structureComposite materialOpticsMetallurgyCrystallographyChemistryChromatographyPhysicsEngineeringSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvancements in Semiconductor Devices and Circuit Design