Production of mixed phase Ti<sup>3+</sup>-rich TiO<sub>2</sub> thin films by oxide defect engineered crystallization
Lauri Palmolahti, Harri Ali‐Löytty, Markku Hannula, Tuomas Tinus, Kalle Lehtola, Antti Tukiainen, Jarno Reuna, Mika Valden
Abstract
Oxygen vacancies and Ti 3+ defects in the amorphous phase of TiO 2 predetermine vacuum annealing induced crystallization. Anatase, nanocrystalline rutile or mixed phases can be created by defect engineering without affecting the O/Ti ratio.
Topics & Concepts
CrystallizationMaterials scienceOxidePhase (matter)Chemical engineeringThin filmNanotechnologyMetallurgyChemistryOrganic chemistryEngineeringTiO2 Photocatalysis and Solar CellsCatalytic Processes in Materials ScienceAdvanced Photocatalysis Techniques