On the rumpling mechanism in nanocrystalline coatings: Improved by reactive magnetron sputtering with oxygen
Bo Meng, Jinlong Wang, Lanlan Yang, Minghui Chen, Shenglong Zhu, Fuhui Wang
Topics & Concepts
Nanocrystalline materialMaterials scienceCoatingSputteringSputter depositionComposite materialOxygenCavity magnetronMetallurgyChemical engineeringThin filmNanotechnologyChemistryOrganic chemistryEngineeringHigh-Temperature Coating BehaviorsDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics