Non-integral depth measurement of high-aspect-ratio multi-layer microstructures using numerical-aperture shaped beams
Wei-Hsin Chein, Fu-Sheng Yang, Komal Thakur, Guowei Wu, Liang-Chia Chen
Topics & Concepts
OpticsNumerical apertureMaterials scienceLaser linewidthMetrologyReflectometryLaserAperture (computer memory)OptoelectronicsPhysicsAcousticsComputer scienceWavelengthTime domainComputer visionAdvanced Surface Polishing TechniquesOptical Coatings and GratingsOptical measurement and interference techniques