Room temperature deposition of stable p-type ZnO:N thin films through chemical species modulation using reactive pulsed laser deposition
Angel Regalado-Contreras, M.H. Farı́as, W. De La Cruz
Topics & Concepts
X-ray photoelectron spectroscopyThin filmMaterials sciencePulsed laser depositionAnalytical Chemistry (journal)Electrical resistivity and conductivityPhotolithographyChemical vapor depositionTorrDopingDeposition (geology)OptoelectronicsNanotechnologyChemical engineeringChemistryPhysicsPaleontologyChromatographyEngineeringBiologyElectrical engineeringSedimentThermodynamicsZnO doping and propertiesGa2O3 and related materialsGas Sensing Nanomaterials and Sensors