Microstructure, mechanical properties and tribological behavior of (TiZrHfNbTa)Nx high entropy films deposited by magnetron sputtering
Fanyong Zhang, Ruibin Zhao, Honglu Ma, Hongshu Jin, Liangquan Wang, Senlong He, Fuxing Yin
Topics & Concepts
Materials scienceMicrostructureSputter depositionAmorphous solidCrystallinitySputteringComposite materialElastic modulusWaferNitrideThin filmNanotechnologyCrystallographyChemistryLayer (electronics)Metal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research