Reduction of threading dislocation densities of N-polar face-to-face annealed sputtered AlN on sapphire
Kanako Shojiki, Kenjiro Uesugi, Shigeyuki Kuboya, Hideto Miyake
Topics & Concepts
SapphireMaterials sciencePolarAnnealing (glass)SputteringTransmission electron microscopyDislocationNitrideAnalytical Chemistry (journal)Scanning electron microscopeMetalCrystallographyComposite materialThin filmChemistryMetallurgyOpticsNanotechnologyLayer (electronics)AstronomyLaserPhysicsChromatographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies