A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry
Guillermo Sobreviela-Falces, Milind Pandit, Arif Mustafazade, Chun Zhao, Callisto Pili, Colin Baker, Ashwin A. Seshia
Abstract
A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of ±1 g (1 g = 9.8 m s <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-2</sup> ) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times τ = 1 s - 1000 s with a best-case bias instability of <; 10 ng and a noise floor of 10 ng/√H. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.