Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer
Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryoichi Takayama, Shuji Tanaka
Topics & Concepts
Ultrasonic sensorPiezoelectricityMaterials sciencePMUTLead zirconate titanateAcousticsTransducerCapacitive micromachined ultrasonic transducersDielectricOptoelectronicsFerroelectricityComposite materialPhysicsUltrasonics and Acoustic Wave PropagationPhotoacoustic and Ultrasonic ImagingAcoustic Wave Resonator Technologies