Blistering-free polycrystalline silicon carbide films for double-sided passivating contact solar cells
Jingming Zheng, Zhenhai Yang, Linna Lu, Mengmeng Feng, Yuyan Zhi, Yiran Lin, Mingdun Liao, Yuheng Zeng, Baojie Yan, Jichun Ye
Topics & Concepts
PassivationMaterials scienceAnnealing (glass)Plasma-enhanced chemical vapor depositionPolycrystalline siliconChemical vapor depositionSiliconSurface roughnessDopingComposite materialNanotechnologyOptoelectronicsLayer (electronics)Thin-film transistorSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis