Broad bandwidth air-coupled micromachined ultrasonic transducers for gas sensing
Priyadarshini Shanmugam, Luis E. Iglesias, Jean-François Michaud, Daniel Alquier, Laurent Colin, I. Dufour, Dominique Certon
Topics & Concepts
Capacitive micromachined ultrasonic transducersTransducerUltrasonic sensorMaterials scienceAcousticsBandwidth (computing)Capacitive sensingMicrophoneCommon emitterVoltageOptoelectronicsComputer scienceElectrical engineeringPhysicsTelecommunicationsSound pressureOperating systemEngineeringFlow Measurement and AnalysisUltrasonics and Acoustic Wave PropagationUltrasound Imaging and Elastography