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Enhanced dielectric and energy storage performances of Hf0.6Zr0.4O2 thin films by Al doping

Seungwon Lee, Min Ji Jeong, Youkyoung Oh, Hyo‐Bae Kim, Tae‐Eon Park, Ji‐Hoon Ahn

2023Ceramics International14 citationsDOI

Topics & Concepts

Materials scienceFerroelectricityTetragonal crystal systemDielectricThin filmDopingMonoclinic crystal systemOptoelectronicsPermittivityPolarization (electrochemistry)Crystal structureNanotechnologyCrystallographyPhysical chemistryChemistryFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesMXene and MAX Phase Materials
Enhanced dielectric and energy storage performances of Hf0.6Zr0.4O2 thin films by Al doping | Litcius