MoS<sub>2</sub> hybrid integrated micro-ring resonator phase shifter based on a silicon nitride platform
Zexing Zhao, Ziming Zhang, Jiatong Li, Zhenyuan Shang, Guoqing Wang, Jinde Yin, Hao Chen, Kai Guo, Peiguang Yan
Abstract
We demonstrate a low-power, compact micro-ring phase shifter based on hybrid integration with atomically thin two-dimensional layered materials, and experimentally establish a low-loss silicon nitride platform. Using a wet transfer method, a large-area few-layer MoS 2 film is hybrid integrated with a micro-ring phase shifter, leading to a tuning efficiency of 5.8 pm V −1 at a center wavelength of 1545.294 nm and a half-wave-voltage-length product as low as 0.09 V cm. Our device is designed to provide a hybrid-integration-based active phase modulation scheme for integrated optical communication networks with large-cross-section silicon nitride waveguides.