A tip-tilt-piston piezoelectric micromirror with double-S shaped actuators based on sputtered PZT
Ke Cao, Qincheng Zheng, Hao Chen, Bo Xie, Ning Deng, Hui Shang, Yao Lu, Huikai Xie
Topics & Concepts
Tilt (camera)ActuatorPiston (optics)Materials sciencePiezoelectricityAcousticsOpticsOptoelectronicsElectrical engineeringMechanical engineeringComposite materialEngineeringPhysicsWavefrontAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators