Atomistic mechanism of AlCu thin film alloy growth on trenched Si substrate
M. Lablali, H. Mes-adi, Adil Eddiai, M. Mazroui
Topics & Concepts
Materials scienceTrenchThin filmSubstrate (aquarium)Surface finishSurface energySurface roughnessAtom (system on chip)Composite materialCondensed matter physicsNanotechnologyLayer (electronics)Computer scienceEmbedded systemGeologyPhysicsOceanographySemiconductor materials and devicesCopper Interconnects and ReliabilityZnO doping and properties