High Performance AlN/GaN HEMT for Millimeter-Wave Low-Voltage Applications Fabricated Using Low-Damage Etching
Hanzhen Li, Minhan Mi, Can Gong, Pengfei Wang, Yuwei Zhou, Xinyi Wen, S. Y. Wen, Xiaohua Ma
Topics & Concepts
High-electron-mobility transistorOptoelectronicsEtching (microfabrication)Materials scienceWide-bandgap semiconductorGallium nitrideExtremely high frequencyVoltageTransistorElectrical engineeringNanotechnologyComputer scienceLayer (electronics)EngineeringTelecommunicationsGaN-based semiconductor devices and materialsRadio Frequency Integrated Circuit DesignAcoustic Wave Resonator Technologies