Effect of silicon nitride coating thickness on silicon wafer substrates for signal enhancement in laser-induced breakdown spectroscopic analysis of liquids
Dilara Kaplan, Şerife Yalçın
Topics & Concepts
Silicon nitrideWaferMaterials scienceCoatingSubstrate (aquarium)SiliconNitrideCalibration curveSilicon oxideAnalytical Chemistry (journal)OptoelectronicsComposite materialDetection limitLayer (electronics)ChemistryOceanographyChromatographyGeologyLaser-induced spectroscopy and plasmaAnalytical chemistry methods developmentMercury impact and mitigation studies