Variety of ZnO nanostructured materials prepared by PECVD
Leonid Mochalov, Alexander Logunov, I. O. Prokhorov, M. A. Vshivtsev, Mikhail Kudryashov, Yulia Kudryashova, В. М. Малышев, Yu. M. Spivak, E. D. Greshnyakov, A. V. Knyazev, Diana G. Fukina, P. A. Yunin, В. А. Мошников
Topics & Concepts
Plasma-enhanced chemical vapor depositionMaterials scienceZincPlasmaHydrogenStoichiometryInductively coupled plasmaChemical engineeringOxygenThin filmAnalytical Chemistry (journal)Chemical vapor depositionNanotechnologyChemistryPhysical chemistryMetallurgyOrganic chemistryQuantum mechanicsEngineeringPhysicsZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications