Multi-scale guidance diffusion network for wafer map defect recognition
Zuxiang Long, Jinda Yan, Minghao Piao
Topics & Concepts
WaferComputer scienceScale (ratio)DiffusionArtificial intelligencePattern recognition (psychology)Data miningMaterials scienceCartographyOptoelectronicsGeographyPhysicsThermodynamicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques