Effects of Ta content on the oxidation and high-temperature tribological behaviors of (Zr, Ta) N coating deposited by double-cathode glow plasma alloy
Mengjuan Yin, Wenping Liang, Qiang Miao, Haiyang Yu
Topics & Concepts
Materials scienceCoatingAlloyCathodeTribologyPlasmaMetallurgyTantalumGlow dischargeChemical engineeringComposite materialPhysical chemistryChemistryEngineeringQuantum mechanicsPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCopper Interconnects and Reliability