Removal behavior of micropipe in 4H-SiC during micromachining
Yuhua Huang, Miaocao Wang, Jinming Li, Fulong Zhu
Topics & Concepts
Materials scienceSurface micromachiningSilicon carbideMachiningBulk micromachiningEpitaxyPenetration (warfare)Penetration depthAbrasiveComposite materialOptoelectronicsOpticsFabricationMetallurgyMedicineAlternative medicineEngineeringPathologyPhysicsOperations researchLayer (electronics)Advanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchSilicon Carbide Semiconductor Technologies