30 Years of atomic force microscopy: Creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners
H. Habibullah
Topics & Concepts
ScannerPiezoelectricityMaterials scienceVibrationScanning probe microscopyMicroscopeScanning acoustic microscopeAtomic force microscopyCreepAcousticsOpticsMicroscopyNanotechnologyAcoustic microscopyPhysicsComposite materialForce Microscopy Techniques and ApplicationsPiezoelectric Actuators and ControlNear-Field Optical Microscopy